Quantitative depth‐dependent analysis using the inelastic scattering backgrounds from X‐ray photoelectron spectroscopy and hard X‐ray photoelectron spectroscopy

The inelastic scattering contribution to an X-ray photoelectron spectrum (XPS) reflects the distribution of elements within sample depth. Varying energy incident photons changes contribution. We present a standardless, automated method that exploits this change enable compositional analysis XPS information depth (also known as amount substance, AOS3λ). In method, intensities observed using two or more photon energies are normalised correction factors. These factors derived determine AOS3λ from signals collected different samples. then compared with ratio elastic peak calculated for depths find layer thickness. has been applied analyse spectra thin amorphous carbon films yield quantitative, standardless and analysis.